Realization of cantilever arrays for parallel proximity imaging

This paper reports on the fabrication and characterisation of self-actuating, and selfsensing cantilever arrays for large-scale parallel surface scanning. Each cantilever is integrated with a sharp silicon tip, a thermal-driven bimorph actuator, and a piezoresistive deflection sensor. Thus, the tip to the sample distance can be controlled individually for each cantilever. A radius of the tips below 10 nm is obtained, which enables nanometre in-plane surface imaging by Angstrom resolution in vertical direction. The fabricated cantilever probe arrays are also applicable for large-area manipulation, sub-10 nm metrology, bottom-up synthesis, high-speed gas analysis, for different bio-applications like recognition of DNA, RNA, or various biomarkers of a single disease, etc.